عنوان المقالة:. المشاركة في المؤتمر الدولي الاول حول الهندسة الميكانيكية الالكترونية وهندسة النظم الحيوية (MEBSE2018) في بوجور ز اندونيسيا Participation in the first international conference on electronic mechanical and biological systems engineering (MEBSE2018) in Bogor g, Indonesia
In this work, the structural properties of the monocrystalline vanadium pentoxide
have been presented. Vanadium pentoxide (V2O5) films were deposited by using a DC reactive
magnetron sputtering system at working pressure of 8.5x10-2mbar. The sputtered vanadium
atoms were sputtered and oxidized in presence O2:Ar gas mixture by
(5/95,10/90,15/85,20/80,30/70,50/50). Employment of magnetron results in the formation of
V2O5 in the final samples according to the XRD analysis, increase the roughness and hence
surface area of the produced V2O5nanostructures. The results of X-rays are shown to us, the
deposited films were formed by nanoparticles with average grain size in the range of (52.11nm
to 98.03) nm and roughness Ave (nm) in the range of (1.04nm to 8.88nm) . The deposited films
are identified to be polycrystalline nature with a cubic structure along ((001), (111)) and
((200)) orientation also MonoV2O5, Cub VO were found as deposited. The texture of the films
was observed using SEM and AFM, it was observed that the grain size was increased with
increased the O2 percentage. These improvements in the structural properties of the produced
vanadium pentoxide make these nanostructures good candidates for specific applications, such
as photo detectors, solar cells, electro chromic smart window and gas sensor.