Nanostructural cupric oxide (CuO) films were prepared on Si and
glass substrate by pulsed laser deposition technique (PLD) using
laser Nd:YAG, using different laser pulses energies from 200 to
600 mJ. The X-ray diffraction pattern (XRD) of the films showed a
polycrystalline structure with a monoclinic symmetry and preferred
orientation toward (111) plane with nano structure. The crystallite
size was increasing with increasing of laser pulse energy. Optical
properties was characterized by using UV–vis spectrometer in the
wave lengthrange (200-1100) nm at room temperature. The results
showed that the transmission spectrum decreases with the laser
pulses energy increase. Sensitivity of NO2 gas at different operating
temperatures, (50°C, 100°C, 150°C and 200°C) was calculated.