Hatem Taha, David J. Henry , Chun-Yang Yin, Amun Amri, Xiaoli Zhao, Syaiful Bahri, Cam Le Minh, Nguyen Ngoc Ha, M. Mahbubur Rahman, Zhong-Tao Jiang
الملخص الانجليزي
Titanium-doped indium tin oxide thin films were synthesized via a sol-gel spin coating process. Surface
chemical bonding states and mechanical properties have been investigated as a function of titanium
content (2 and 4 at%) and annealing temperature ranging from 400 to 600 C with increments of 100 C.
Raman analysis was performed to study the phonon vibrations for the prepared samples and the results
revealed the existence of ITO vibrational modes. The elemental compositions, bonding states and binding
energies of the film materials were investigated using X-ray photoelectron spectroscopy (XPS) technique.
The XPS results indicated that the ratio of the metallic elements (In, Sn, Ti) to the oxygen on the surface
of the thin film coatings decreased due to the increase of the oxide layer on the surface of the thin films.
Also, by increasing the annealing temperature up to 600 C, the Ti 2p and Cl 2p signals were no longer
detected for both 2 and 4 at% Ti contents, respectively, due to the thicker surface oxidation layer. Mechanical properties of the synthesized films were also evaluated using a nanoindentation process. Variations in the hardness (H) and the elastic modulus (E) were observed with different Ti at% and annealing
temperatures. The hardness is within the range of 6.3e6.6 GPa and 6.7e6.8 GPa for 2 and 4 at% Ti content
samples, respectively, while the elastic modulus is within the ranges of 137e143 and 139e143 GPa for
2 at% and 4 at% Ti contents samples, respectively. A combination of the highest H and E were achieved in
the sample of 4% Ti content annealed at 600 C. Furthermore, the H/E ratio ranges from 4.5 102 to
5.0 102 which reflects a reasonable level of wear resistance.
تاريخ النشر
03/06/2017
الناشر
Journal of Alloys and Compounds/ Elsevier
رقم المجلد
رقم العدد
ISSN/ISBN
0925-8388
رابط DOI
http://dx.doi.org/10.1016/j.jallcom.2017.06.007
الصفحات
333-346
الكلمات المفتاحية
Transparent conductive oxide ITO Titanium doped indium tin oxide Sol-gel Thermal treatment X-ray photoelectron spectroscopy
حاتم عبدالرزاق طه | Hatem Taha | 3213