عنوان المقالة:ﺍﻷﺩﺍﺀ ﺍﻟﺒﺼﺭﻱ ﺍﻻﻟﻜﺘﺭﻭﻨﻲ ﻟﻌﺩﺴﺔ ﺠﻴﻤﻨﻲ (Gemini Lens) ﺍﻟﻤﺼﻤﻤﺔ ﻟﻠﻤﺠﻬﺭ ﺍﻻﻟﻜﺘﺭﻭﻨﻲ ﺍﻟﻤﺎﺴﺢ ﺫﻱ ﺍﻟﻔﻭﻟﺘﻴﺔ ﺍﻟﻭﺍﻁﺌﺔ The Electron Optical Performance of the Gemini Lens Design for Low Voltage Scanning Electron Microscope
نضال سعدي عبد حجازي | Nedhal Sadie Abd Hujazie | 9321
نوع النشر
مجلة علمية
المؤلفون بالعربي
نضال سعدي حجازي , منى الخشاب
المؤلفون بالإنجليزي
M.A. Al-Khashab and N.S. Hujazie
الملخص العربي
ﻟﻘﺩ ﺘﻡ ﺍﻟﺤﺼﻭل ﻋﻠﻰ ﻗﺩﺭﺍﺕ ﺘﺤﻠﻴل ﻓﺎﺌﻘﺔ ﻋﻨﺩ ﻁﺎﻗﺎﺕ ﻤﻨﺨﻔﻀﺔ ﻟﻠﺤﺯﻤﺔ ﺍﻻﻟﻜﺘﺭﻭﻨﻴﺔ ﻭﺼﻭﻻ ﺇﻟﻰ،(100eV) ﻭﺫﻟﻙ ﺒﺘﻭﻅﻴﻑ ﻋﺩﺴﺎﺕ ﻤ ﺭﻜﺒﺔ ﻟﺘﺼﺤﻴﺢ ﺍﻟﺯﻴﻎ ﺍﻟﻠﻭﻨﻲ ﻭﺍﻟﻤﺴﺘﺨﺩﻤﺔ ﺤﺩﻴﺜﺎ ﻜﻌﺩﺴﺔ ﺸﻴﺌﻴﺔ ﻓﻲ ﺍﻟﻤﺠﺎﻫﺭ ﺍﻻﻟﻜﺘﺭﻭﻨﻴﺔ ﺍﻟﻤﺎﺴﺤﺔ ﻭﺍﻟﺘﻲ ﺘﻌﻤل ﺒﻔﻭﻟﺘﻴﺔ .(Gemini Lens) ﻭﺍﻁﺌﺔ ﺘﺩﻋﻰ ﻋﺩﺴﺔ ﺠﻴﻤﻨﻲ ﻓﻭﺭﺘﺭﺍﻥ ، ﻭﻷﺠل ﺍﺤﺘﺴﺎﺏ ﺍﻟﺨﻭﺍﺹ ﺍﻟﺒﺅﺭﻴﺔ ﺍﻟﺸﻴﺌﻴﺔ ﻟﻠﻌﺩﺴﺔ ﺍﻟﻤﺭﻜﺒﺔ ، ﻓﻘﺩ ﻭﻀﻊ ﺒﺭﻨﺎﻤﺞ ﺠﺩﻴﺩ ﺒﻠﻐﺔ ﻭﻟﻭﺤﻅ ﺃﻥ ﻫﻨﺎﻟﻙ ﺘﺤﺴﻨﺎ ﻜﺒﻴﺭﺍﹰ ﻓ ﺍﻻﻟﻜﺘﺭﻭﻨﻴﺔ ﻲ ﺍﻟﺨﻭﺍﺹ ﺍﻟﺒﺅﺭﻴﺔ ﺍﻟﺸﻴﺌﻴﺔ ﺨﺼﻭﺼﺎ ﻋﻨﺩ ﺍﻟﻁﺎﻗﺎﺕ ﺍﻟﻤﺘﺩﻨﻴﺔ ﻟﻠﺤﺯﻤﺔ . ﻭﻜﺎﻨﺕ ﻤﻌﺎﻤﻼﺕ ﺍﻟﺯﻴﻭﻍ ﺍﻟﻨﺎﺘﺠﺔ ﺍﻗل ﺒﻜﺜﻴﺭ ﻤﻥ ﻤﺜﻴﻼﺘﻬﺎ ﺍﻟﻤﺴﺘﺨﺩﻤﺔ ﺒﺤﻭﺍﻟﻲ ﺍﻟﻨﺼﻑ. ﺒﻤﻘﺎﺭﻨﺔ ﻨﺘﺎﺌﺞ ﺨﻭﺍﺹ ﺍﻟﻌﺩﺴﺔ ﺍﻟﻤﺭﻜﺒﺔ ﻷﻓﻀل ﺘﺼﻤﻴﻡ ﻤﻊ ﻨﺘﺎﺌﺞ ﺍﻟﺒﺤﻭﺙ ﺍﻟﻤﻨﺸﻭﺭﺓ ﺤﺩﻴﺜﺎ ﻭﺍﻟﻤﺘﻭﻓﺭﺓ ﻭﺠﺩ ﺃﻥ ﻜﻠﻴﻬﻤﺎ ﻴﺘﻔﻘﺎﻥ ﻤ ﺍﻟﻤﻌ ﻌﺎ ﺇﻟﻰ ﺤﺩ ﻤﺎ ﻭﻫﺫﻩ ﻴﻠﻲ ﺎﻤﻼﺕ ﻫﻲ ﻜﻤﺎ : ﻭﺒﻘـ Cs=1.15 mmﻭ Cc=0.78 mm ﺘﺴ ﺩﺭﺓ ﺘﺤﻠﻴل ـ ﺃل ﺠﻬﺩ 10 nm ﺎﻭﻱ ﺤﻭﺍﻟﻲ ﺍﺸﺘﻐـ 100 V ﻋﻨﺩ ﻓﺭﻕ ﻭﻤﺴﺎﻓﺔ ﺎل W.D.=4 mm . ﻭﻭﺠﺩﺃﻴﻀﺎ ﺍﻟﺘﺸﻐﻴل ﺇﻥ ﺍﻟﻨﺘﺎﺌﺞ ﺃﻅﻬﺭﺕ ﺘﻔﻭﻗﺎ ﻜﺒﻴﺭﺍ ﻓﻲ ﺍﻷﺩﺍﺀ ﺍﻟﺒﺼﺭﻱ ﻟﻤﺩﻯ ﻭﺍﺴﻊ ﻤﻥ ﻓﻭﻟﺘﻴﺔ .
الملخص الانجليزي
The superb resolution at low beam energies, down to 100 eV, is achieved by employing a compound lens which was used recently as an objective lens in low-voltage SEM, called Gemini lens. A new program has been devised in FORTRAN language in order to compute the objective focal properties for the compound lens. It has been noticed that an improvement is achieved in the objective focal properties, especially at low beam energies, such as the aberration coefficients. The aberration coefficients achieved by our compound lens at beam voltage of 100 V are found to be lower than those achieved by pure magnetic lens by a factor of almost half. (i.e. Cs = 1.15 mm, Cc = 0.78 mm, W. D = 4 mm and δ ≈ 10 nm). The results of the compound lens of our preferable design were compared with the results in the available published papers and found to be in good agreement over a wide range of applied voltage.
تاريخ النشر
20/02/2011
الناشر
Dirasat, Pure Sciences
رقم المجلد
38
رقم العدد
1
ISSN/ISBN
1560-456x
الصفحات
52-60
رابط الملف
تحميل (179 مرات التحميل)
الكلمات المفتاحية
Compound Lens, Gemini Objective Lens, Ultra-High Performance Objective Lens, LowVoltage Scanning Electron Microscope (SEM). 1
رجوع