عنوان المقالة: Structural and optical properties of spin coating ITO thin films
حاتم عبدالرزاق طه | Hatem Taha | 2429
نوع النشر
مؤتمر علمي
المؤلفون بالعربي
المؤلفون بالإنجليزي
Hatem Taha, Zhong-Tao Jiang, David Henry, Amun Amri, Chun-Yang Yin, M. Mahbubur Rahman, Hantarto Widjaja, Ehsan Mohammadpour, Nicholas Mondinos
الملخص الانجليزي
Among all the transparent conductive oxides and/or materials, indium tin oxide (ITO) still represents the major dominant due to its high optical transparency and high electrical conductivity. So far, doping ITO with a transition element such as (Ti, Mo, Zr, Cu) has become of great interest due to the improvement in its optoelectronic properties. Transparent and conductive films of titanium- doped indium tin oxide (Ti:ITO) have been prepared via a low cost and simple sol-gel spin coating technique. The effect of Ti valance and annealing temperature on to the structural, morphological, optical and electrical properties of the synthesized films were studied. All the (Ti:ITO) samples are of about (350nm) thick which are confirmed by scanning electron microscopy (SEM). X-ray diffraction XRD analysis confirmed the cubic bixbyite structure of polycrystalline indium oxide phase and increasing annealing temperature has improved the crystallinity of the films and at 500°C the high quality crystalline structure with grain sizes 79 and 65 nm were obtained for the films of 4 at% and 2 at% respectively . Also, the particles size was affected positively with increasing annealing temperature. Field effect scanning electron microscopy (FESEM) images established the dependence of the crystal structure and crystal size on the annealing temperature as mentioned in XRD results. Also, the electrical and the optical properties for the synthesized samples have been improved as the annealing temperature increased, and according to the results, the highest optical transmittance and the lowest electrical resistivity were obtained at (500°C) which are (92%) and (1.6×10-4 Ω.cm) respectively. .
تاريخ النشر
21/04/2015
الناشر
Australian Institute of Physics (AIP)
رقم المجلد
رقم العدد
الصفحات
11
الكلمات المفتاحية
titanium doped indium tin oxide, sol-gel spin coating, heat treatment, ITO
رجوع