Nuclear Instruments and Methods in Physics Research B
Abstract
Experimental measurements of the etching solution temperature dependence of bulk etch rate using two
independent methods revealed a few interesting properties. It is found that while the track saturation
length is independent of etching temperature, the etching time needed to reach saturation is strongly
temperature-dependent. It is demonstrated that there is systematic simple inverse relation between
track saturation time, and etching solution temperature. In addition, and although, the relation between
the bulk etch rate and etching solution temperature can be reasonably described by a modified form of
the Arrhenius equation, better fits can be obtained by another equation suggested in this work.
د.مشتاق عبد داود مسلط الجبوري | Dr. Mushtaq Abed Dawood Al-Jubbori | 5947