عنوان المقالة:ﺗﺻﻣﯾم ﺣﺎﺳوﺑﻲﻟﻣﻧظوﻣﺔ اﻟﻌدﺳﺎتاﻟﻣﻐﻧﺎطﯾﺳﯾﺔ اﻟﻣﻛﺛﻔﺔ اﻟﻣزدوﺟﺔ ﻓﻲ اﻟﻣﺟﻬر اﻻﻟﻛﺗروﻧﻲ اﻟﻣﺎﺳﺢ Design Software of the Double Condenser Magnetic Lens System in a Scanning Electron Microscope
نضال سعدي عبد حجازي | Nedhal Sadie Abd Hujazie | 9321
نوع النشر
مجلة علمية
المؤلفون بالعربي
ﻧﺿﺎل ﺳﻌدي ﻋﺑد ﺣﺟﺎزي . ﻣﺣﻣد ﻋﺑداﷲ ﺣﺳﯾن،
المؤلفون بالإنجليزي
Nedhal Sadie Abid Hujazie Mohammed Abdullah Hussain ,
الملخص العربي
ﺗﻧﺎول اﻟﺑﺣث دارﺳﺔ ﻣﻛﺛﻔﺔ ﻋن اﻷداء اﻟﺑﺻري ﻟﻣﻧظوﻣﺔ اﻟﻌدﺳﺎت اﻟﻣﻐﻧﺎطﯾﺳﯾﺔ اﻟﻣﻛﺛﻔﺔ اﻟﻣزدوﺟﺔ ﻣن اﺟل اﻟﺣﺻول ﻋﻠﻰ أﻓﺿل ﺗﺻﻣﯾم ﻟﻠﻌدﺳﺎت اﻟﻣﻛﺛﻔﺔ ﻓﻲ ﻣﻧظوﻣﺔ اﻹﺿﺎءة ﻟﻠﻣﺟﻬر اﻷﻟﯾﻛﺗروﻧﻲ اﻟﻣﺎﺳﺢ .إذ ﺗم اﻗﺗارح أرﺑﻌﺔﻧﻣﺎذج ﻣن اﻟﻌدﺳﺎت اﻟﻣﻐﻧﺎطﯾﺳﯾﺔ اﻟﻣزدوﺟﺔ اﻟﻣﺗﺳﺎوﯾﺔ ﻓﻲ أﺑﻌﺎدﻫﺎ اﻟﻬﻧدﺳﯾﺔ ﺟﻣﯾﻌﺎ وﻣﺧﺗﻠﻔﺔ ﻓﻘط ﻓﻲ اﻟﺷﻛل ، اﻟﻬﻧدﺳﻲ ﻟﻠﻘطب ووﺟد ﺑﺎن اﻟﺷﻛل اﻟﻬﻧدﺳﻲ ﻟﻪ ﺗﺄﺛﯾر واﺿﺢ ﻋﻠﻰ اﻟﺧواص اﻟﺑؤرﯾﺔ ﻣن ﺣﯾث )اﻟﺑﻌد اﻟﺑؤري ﻣﻘدار اﻟﺗﺻﻐﯾر ﻓﻲ ﺣﺟم اﻟﻣﺻدر اﻻﻟﻛﺗروﻧﻲ وﺣﺳﺎﺑﺎت ﻗطر اﻟﺣزﻣﺔ اﻻﻟﻛﺗروﻧﯾﺔ ( واﻟذي ﯾﻌﺗﻣد ﺑﺻورة رﺋﯾﺳﯾﺔ ﻋﻠﻰ ﻛﺛﺎﻓﺔ اﻟﺗﯾﺎر اﻟﻣﺎر ﻓﻲ ﻣﻧظوﻣﺔ اﻟﻌدﺳﺎت اﻟﻣﻛﺛﻔﺔ اﻟﻣزدوﺟﺔ وﻟﻐرض زﯾﺎدة ﻣﻘدار اﻟﺗﺻﻐﯾر ﯾﺗم ﺗﺷﻐﯾل وأﺧﯾار ﺗم وﺿﻊ ﻣﺧططﺎت ﻣﻌﺎﯾرة ﻟﺟﻬﺎز ﻟﻠﻣﺟﻬر اﻷﻟﯾﻛﺗروﻧﻲ اﻟﻣﺎﺳﺢ اﻟﺗﻲ ﯾﻣﻛن ﻣن ،اﻟﻣﻧظوﻣﺔ ﺑﺎﻟﻧﻣط اﻟﻘوي ﺧﻼﻟﻬﺎ ﻣﻌرﻓﺔ ﻛﺎﻓﺔ اﻟﻣﻌﻠوﻣﺎت اﻟﻣطﻠوﺑﺔ ﻋن اﻟﺣزﻣﺔ اﻻﻟﻛﺗروﻧﯾﺔ.
الملخص الانجليزي
The present work is dealing with an intensive study for the optical performance of the double magnetic condenser lens system in order to obtain an optimum design for the condenser lenses in the illumination system for scaning electron microscope SEM. Four models of double magnetic lenses have been designed of equal geometrical dimensions and of different geometrical shape of the pole. It is found that the geometrical shapes of the pole has a great effect on the focal properties such as (focal length, demagnification of source size and the electron beam diameter calculation), which depended on the current density passing through the double magnetic condenser lens system. In order to get more demagnification in spot size, we must use the strong mode. Finally, a calibration curve of the scanning electron microscope SEM has been drawn and it can get all the information about the electron beam.
تاريخ النشر
01/01/2014
الناشر
المجلة العراقية للعلوم
رقم المجلد
55
رقم العدد
4
الصفحات
1563-1571
رابط الملف
تحميل (179 مرات التحميل)
الكلمات المفتاحية
Condenser lens, Illumination system, demagnification of source size, electron probe diameter
رجوع